dry etch meaning in English
干法刻蚀
Examples
- Nitrogen trifluoride a new dry etching gas
一种新型干蚀刻气 - Dry etching of molybdenum film in fabrication of thin film transistor liquid crystal display
液晶阵列工艺中金属钼的干法刻蚀研究 - The principle and the main parameters of the dry etching for silicon dioxide are introduced
摘要阐述了二氧化矽干法蚀刻的原理和主要的蚀刻参数。 - To approach as a resist in dry etching processing , etching properties of the films in oxygen plasma have been investigated
为了探索该种薄膜在干刻蚀工艺过程中用作掩膜的可能性，还研究了它在氧离子体中的刻蚀性能。 - When the two layers of sio2 with different refractive index are finished , the designed mask pattern is printed on the film by photolithography . after that , icp is performed for dry etching , then , the waveguide structures are obtained . at present , the rudimental graph of edg has been obtained
两层不同折射率的sio _ 2薄膜制备好之后，经过光刻、等离子体刻蚀( icp )的工艺步骤之后，形成了波导结构，初步制作出了器件的图形。